The operation of the vacuum coating machine

The operation of the vacuum coating machine

Vacuum coating machine mainly refers to a kind of need to be done under high vacuum coating, including many types, including vacuum ion evaporation, magnetron sputtering, MBE molecular beam epitaxy. The user for operating method of vacuum coating machine know? Below small make up for the operation method of the introduction of vacuum coating machine, hope you can help to you.
Electric control cabinet operation
1. Open water pump, air source.
2. Open the total power.
3. Maintain open pump, vacuum gauge, vacuum gauge files V1 position, wait for after its value is less than 10, then into the next operation. Takes about 5 minutes.
4. Open mechanical pump, to pump, turbomolecular pump power supply, start, vacuum gauge switch in position to V2, smoke until less than 2, about 20 minutes.
5. Observe the turbo molecular pump reading after 250, take out, to be before the machine and open
High valve to vacuum, vacuum reaches a certain degree to drive on the right side of the high vacuum header, observe the vacuum degree. Vacuum arrived at 2 x 10-3 after to open gun power supply.
DEF - 6 b operation
1. The total power supply.
2. At the same time open Ⅰ gun control and gun control Ⅱ power: according to the electron gun control Ⅰ power supply, delay switch, delay, power and to protect the light, three minutes after the time delay and protect the lights went out, if the back door is not closed or malfunction with the current relay, protect will normally on.
3. High pressure, high pressure will reach more than 10 kv, adjust the beam to about 200 ma, screen grid for 20 v / 100 ma, the filament current is 1.2 A, deflection current oscillation between 1 ~ 1.7.
Shut down the order
1. Close the high vacuum header, molecular pump.
2. Stay molecular pump to 50, in turn off valve, former level, high mechanical pump, this time takes about 40 minutes.
3. Below 50, to maintain the pump.