Movement of the gas particles in the coating process

   

  Core Tip: In the process of coating in vacuum coating equipment, all the time are inseparable from the motion of the particles, where the particles including electrons, atoms, molecules, ions, and when they collide will be issued.
  In the process of coating the vacuum coating equipment, all the time are inseparable from the motion of the particles, where the particles including electrons, atoms, molecules, ions, as will happen when they collide with each other in a variety of role for the gas particles often happens is that the ionization and excitation.
  For example, sputtering vacuum coating machine, argon ions are produced by colliding electrons and argon molecules. Before electrons collide with argon in a state of high-speed movement, argon molecule is a single atomic structure, electron and atomic inelastic collision, the electron kinetic energy brought to the atom, according to the law of conservation of energy, the electron kinetic energy reduction, atomic internal energy increased after atomic electrons gain energy from low energy level on the transition to the high energy level, stimulate atom, the ground state atoms become excited by the state, but this time is very short, can be said to be an instant thing, some can be maintained around 10-7 time.
  If the energy of the electron atoms get large enough, you can get rid of the shackles of the nucleus and become free electrons, atoms from electrons, neutrons and protons, electrons are negatively charged, uncharged neutrons, protons are positively charged atoms electronic charge number and the charge number of protons equal, the atoms are not charged, but become free electrons break free electrons leave the atom, the proton atom electron charge number greater than the number of charges, causing atoms into positively charged ions, the target and the power supply cathode phase, positively charged argon ions in the electric field, the acceleration motion to the cathode. When an atom of argon ions collide with the target on, some ion kinetic energy transferred to the atom, atom sputtered out, and another part of the ion and atom after the collision, the electron transfer to the atom on the argon ions, argon ion obtain negative electric charge equal to the number of electrons, reduction of argon atoms, metal atoms lose electrons to become metal positive ions, and get part of kinetic energy.
  This is the movement sputtering in argon particles by atoms become ions, and then by the ion into a atom process repeatedly.