Vacuum coating machine operating procedures
1. Check Coater each operation control switch is in the "off" position.
2. Turn on the power switch, power transmission equipment.
3. Pull out the low-pressure valve. Pneumatic valve open after airflow hear the sound of the bell to start up valve, bell rise.
4. Mounting tungsten spiral heating child. The PVDF film and aluminum plate fixed on the rotating disk. Wear on the inside of the aluminum wire spiral heating child. Clean up various parts of the bell jar to ensure no impurities dirt.
5. falling bell.
6. Start a mechanical vacuum pump.
7. Open the composite power vacuum gauge (composite vacuum gauge Model: Fzh-1A).
8. When the low vacuum gauge "2" again to move the pointer to 6.7Pa clockwise, push the low pressure valve. Then left knob to "1" to point to a sector rotation measuring position.
9. The opening of the cooling water, diffusion pump start, heating 40min.
10. Pull the low pressure valve. Repeat operation program ⑦: left button "1" Go to point 2 zone measurement position. Low vacuum gauge "2" in the pointer moves clockwise, when the pointer moves to 6.7Pa, open pressure valve (the valve stem clockwise).
11. other low vacuum gauge "2" when the pointer moves to the right 0.1Pa, open filament regulatory switch.
12. Rotate the knob launch "4", so that the high-pressure vacuum gauge "5" in the pointer to the 5.
13. The launch, 0:00, measuring knob "9" to rotate to point zero position.
14. The rotary knob 0:00 "10", so that the high-pressure vacuum gauge "5" in the pointer to the 0 position.
15. The launch, 0:00, measuring knob "9" to rotate to point to the measuring position.
16. Standard rotary knob "3", so that the high-pressure vacuum gauge "5" in the pointer to 10.
17. Rotate "multiplier" switch button "8" to point 10-12, when the high-pressure vacuum gauge "5" in the left pointer counterclockwise when more than one, then the "multiplier" switch knob "8" to the point of rotation 10 -3.
18. When the high pressure vacuum gauge "5" in the counter-clockwise moves the pointer over 6.7Pa, start button switch rotary parts inside the bell to be plated PVDF membrane rotation.
19. Open evaporation button switch. The current sub-plug insertion hole evaporation electrodes allocation (has 1, 2, 3, 4 holes, insert any one hole).
20. The right hand wheel rotation to the right regulator, slowly rotating boost.
14. The rotary knob 0:00 "10", so that the high-pressure vacuum gauge "5" in the pointer to the 0 position.
15. The launch, 0:00, measuring knob "9" to rotate to point to the measuring position.
16. Standard rotary knob "3", so that the high-pressure vacuum gauge "5" in the pointer to 10.
17. Rotate "multiplier" switch button "8" to point 10-12, when the high-pressure vacuum gauge "5" in the left pointer counterclockwise when more than one, then the "multiplier" switch knob "8" to the point of rotation 10 -3.
18. When the high pressure vacuum gauge "5" in the counter-clockwise moves the pointer over 6.7Pa, start button switch rotary parts inside the bell to be plated PVDF membrane rotation.
19. Open evaporation button switch. The current sub-plug insertion hole evaporation electrodes allocation (has 1, 2, 3, 4 holes, insert any one hole).
20. The right hand wheel rotation to the right regulator, slowly rotating boost.
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