2016年3月22日星期二

Principle of rf sputtering coating machine

         
  Exterior burnish products, in fact, most of them are used the surface treatment, and said to the surface treatment, now of the coating is one of the typical type of surface treatment. And this kind of surface treatment of the main characteristic is that after coating makes the product's surface is covered with a layer of thin film and have the function of the isolated from the outside factors influence its surface. And the other is generally after coating, the surface has a certain iuster, for the products, improve the appeal. Now, use a lot of coating machinery, including the control sputtering coating machine, vacuum evaporation equipment, to introduce below the peak sputtering coating machine.
 Vacuum coating machine in a vacuum chamber, applying frequency to set two plates and in more than 50 kh high-frequency electric, is a small amount of electrons in the high frequency electric field in the high frequency electric field under the action of accelerating, collide with gas molecules, make gas ionization and emitted electron, the electronic and high frequency electric field will be accelerated, eventually forming the high frequency glow discharge. Radio frequency glow discharge of glow there is no difference between the two electrodes, each with a cathode dark space and negative hui district, plasma column between the two poles. Input coupling mode of high frequency power supply mode with capacitive coupling and inductance coupling, which is currently an internal principle of splash control sputtering coating machine, also because this principle makes the sputtering coating machine to use stability.

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