Vacuum coating machine basic characteristics and types of valves

Vacuum coating machine vacuum valve characteristics, types: basic characteristics of the vacuum valve having high airtightness (sealing reliable); resistance to airflow as small as possible (i.e., the conductance valve as large as possible); a sealing member wear well, can be used repeatedly, long life; body material and seals put a small volume; flexible operation, easy to clean install, reliable performance and easy maintenance. In addition, the requirements for ultra-high vacuum valves can also bake temperature (450 ℃); on the throttle can even adjust the gas flow requirements.

Common vacuum valve body material mainly metal and glass. Manual vacuum valve actuator handwheel made of high strength plastic material. Glass vacuum piston known as "Hancock" is generally used on glass vacuum system, a small vacuum, vacuum gauge regulatory or calibration systems. The advantage is relatively easy to make, easy to use, easy to clean observation, chemical stability and good insulation, put less gas and so on. The downside is that because of the fragility of glass and curved mouth pistons coated with a layer of fat, so limit its scope. Vacuum industrial production needs, such as vacuum coating equipment, vacuum smelting equipment, vacuum heat treatment equipment, space environment simulation equipment, rocket engine simulation equipment, satellite surface charged analog devices, particle accelerators and controlled nuclear fusion equipment, heavy particle accelerators all metal valve.

Vacuum coating machine vacuum valves are usually classified according to the operating characteristics of the valve, drive principle, connection and usage can be divided into the following categories:
① according to the working pressure: low vacuum valve, high-vacuum valves, ultra-high vacuum valve;
② according to use: cut-off valves, isolation valves, charge (discharge) valve, throttle + feed valve closed valve,, etc;
③ According transmission principle: a manual valve, flashlight dual valves, solenoid valves, pneumatic valves, hydraulic vacuum valve;
④ according to the material: glass vacuum piston (Hancock), metal vacuum valve;
⑤ according to structural characteristics: a flapper valve, flap valves, butterfly valves, ball valves, valve rod, septum valve, gate valve, two-way valve, three-way valve, four-way valves, globe valves, right angle valve.

Influence of the vacuum chamber vacuum coating machine deformation caused

         

To minimize the impact of vacuum coating machine deformation caused by the vacuum chamber, we will guide screw, and other transmission parts fixed on a rigid intermediate layer between the bottom wall of the vacuum chamber with the use of point, line, surface-active support, to absorb and isolate the strain, and set the strain compensation adjustment mechanism, before the system is evacuated, with reference to the theoretical data preset FEM provide appropriate compensation amount, so as to achieve equilibrium under vacuum.

In order to verify the results of the finite element calculation of deformation and compensation of the vacuum chamber were tested. The first step, the indicator is positioned outside the four walls of the vacuum table installed base point, when the vacuum chambers evacuated by a vacuum atmosphere, record changes in the amount of each dial gauge, after normalization for the use of laser self collimator adjust deformation compensation.

By leveling the Autocollimator shines a laser through the glass window of the vacuum chamber is fixed on the table illuminated mirrors, adjusting deformation compensation adjustment mechanism in the atmosphere, so that the reflected light beam enters the field of view Autocollimator reception record two-dimensional angular deviation. Compensation amount is calculated by the finite element (or the first step in measuring) the vacuum state again adjust, obviously, at this time of the reflected beam collimator has been away since the field to receive, but once into the vacuum chamber, the reflected beam again since entering the field of view of the receiving collimator, the record in this case a two-dimensional angular deviation. Both before and after the two-dimensional display of the deviation angle basically.

Lubrication table movement and the environmental impact on the vacuum table scan is in frequent movement Vice vacuum chamber environment, except that instead of sliding to reduce rolling friction coefficient, but the rails, screw, etc. deputy campaign between taking good lubrication is to ensure the normal operation of the cutting apparatus necessary condition for a long time. Vacuum lubrication methods are usually plated solid lubricant film and direct use lubricant coating is easy to destroy the rail movement precision, and complex process. To this end, we tested a commodity market - MoS2 lubricant lubrication, the lubricant is sprayed directly in the sub-surface of the movement, with a quadrupole mass spectrometer and analyzed the lubricant is volatilized in a vacuum gas main component.

Vacuum coating machines and dynamic magnetic field magnetron sputtering source

             

Motorized vacuum coating magnetic field magnetron sputtering vacuum coating sources, including the target substrate, solder or crimp ring is fixed in front of the target substrate sheet target, shielding ring, magnet board, within the magnet mounted on a magnet board and outside the magnet, the improvements made are: the diameter of the magnet is greater than the radius of the target substrate, and smaller than the diameter of the target, the target substrate magnet axis offset from the axis of the substrate, the substrate magnet fixed gear on a positive side, the coating machine ring gear meshing with the spur gear installed on the rack, the rear side of the installation located spur gear motor, motor power output shaft fixed to the frame turn handle, mounted on the gear shaft turn handle. Motor power output shaft and the ring gear coaxial with the target board settings.

The positive effect of this invention is: get a revolution and rotation of the annular magnetic field to scan to each target position, so that the target in a larger area to be etched shot off evenly. High target utilization, coating uniformity.

A moving magnetic field magnetron sputtering vacuum deposition coater, comprising a vacuum deposition chamber in front of the target substrate, welded or fixed to the sheet-shaped pressure ring positive target target substrate, covering the peripheral side surface of the target substrate and the target substrate positive target shielding material outside of the ring portion, an annular outer magnet disposed in combination target substrate on the back of the magnet substrate, the magnet is mounted on the center position of the magnet toward the substrate and the target substrate side circumferential position or arranged in rings outside the magnet,

Its features are: the diameter is larger than the radius of the target substrate magnet, and smaller than the diameter of the target, the target substrate magnet axis offset from the axis of the substrate, the substrate magnet fixed gear on a positive side, the installation and the coating machine frame ring spur gear, is mounted on the rear side of the spur gear rack located motor, the motor power output shaft fixed turn handle, mounted on the gear shaft turn handle.

Movement of the gas particles in the coating process

   

  Core Tip: In the process of coating in vacuum coating equipment, all the time are inseparable from the motion of the particles, where the particles including electrons, atoms, molecules, ions, and when they collide will be issued.
  In the process of coating the vacuum coating equipment, all the time are inseparable from the motion of the particles, where the particles including electrons, atoms, molecules, ions, as will happen when they collide with each other in a variety of role for the gas particles often happens is that the ionization and excitation.
  For example, sputtering vacuum coating machine, argon ions are produced by colliding electrons and argon molecules. Before electrons collide with argon in a state of high-speed movement, argon molecule is a single atomic structure, electron and atomic inelastic collision, the electron kinetic energy brought to the atom, according to the law of conservation of energy, the electron kinetic energy reduction, atomic internal energy increased after atomic electrons gain energy from low energy level on the transition to the high energy level, stimulate atom, the ground state atoms become excited by the state, but this time is very short, can be said to be an instant thing, some can be maintained around 10-7 time.
  If the energy of the electron atoms get large enough, you can get rid of the shackles of the nucleus and become free electrons, atoms from electrons, neutrons and protons, electrons are negatively charged, uncharged neutrons, protons are positively charged atoms electronic charge number and the charge number of protons equal, the atoms are not charged, but become free electrons break free electrons leave the atom, the proton atom electron charge number greater than the number of charges, causing atoms into positively charged ions, the target and the power supply cathode phase, positively charged argon ions in the electric field, the acceleration motion to the cathode. When an atom of argon ions collide with the target on, some ion kinetic energy transferred to the atom, atom sputtered out, and another part of the ion and atom after the collision, the electron transfer to the atom on the argon ions, argon ion obtain negative electric charge equal to the number of electrons, reduction of argon atoms, metal atoms lose electrons to become metal positive ions, and get part of kinetic energy.
  This is the movement sputtering in argon particles by atoms become ions, and then by the ion into a atom process repeatedly.