Vacuum coating machines and dynamic magnetic field magnetron sputtering source

   Vacuum coating machines and dynamic magnetic field magnetron sputtering source

Motorized vacuum coating magnetic field magnetron sputtering vacuum coating sources, including the target substrate, solder or crimp ring is fixed in front of the target substrate sheet target, shielding ring, magnet board, within the magnet mounted on a magnet board and outside the magnet, the improvements made are: the diameter of the magnet is greater than the radius of the target substrate, and smaller than the diameter of the target, the target substrate magnet axis offset from the axis of the substrate, the substrate magnet fixed gear on a positive side, the coating machine ring gear meshing with the spur gear installed on the rack, the rear side of the installation located spur gear motor, motor power output shaft fixed to the frame turn handle, mounted on the gear shaft turn handle. Motor power output shaft and the ring gear coaxial with the target board settings.

The positive effect of this invention is: get a revolution and rotation of the annular magnetic field to scan to each target position, so that the target in a larger area to be etched shot off evenly. High target utilization, coating uniformity.

A moving magnetic field magnetron sputtering vacuum deposition coater, comprising a vacuum deposition chamber in front of the target substrate, welded or fixed to the sheet-shaped pressure ring positive target target substrate, covering the peripheral side surface of the target substrate and the target substrate positive target shielding material outside of the ring portion, an annular outer magnet disposed in combination target substrate on the back of the magnet substrate, the magnet is mounted on the center position of the magnet toward the substrate and the target substrate side circumferential position or arranged in rings outside the magnet,

Its features are: the diameter is larger than the radius of the target substrate magnet, and smaller than the diameter of the target, the target substrate magnet axis offset from the axis of the substrate, the substrate magnet fixed gear on a positive side, the installation and the coating machine frame ring spur gear, is mounted on the rear side of the spur gear rack located motor, the motor power output shaft fixed turn handle, mounted on the gear shaft turn handle.

The vacuum knowledge

The vacuum knowledge

First, the basic concept of vacuum
Vacuum technology, the "vacuum" refers to a given space, the gas pressure is below atmospheric pressure gas state, that is to say, compared with the normal atmospheric pressure, a gas is relatively lean state.
　The degree of vacuum is an objective measure of the degree of lean gas. According to the theory of vacuum technology, the vacuum level is usually represented by gas pressure. In the International System of Units, the pressure is Pa (Pa) as a unit 1Pa = 1N / m2. Another common unit as well as child care (Torr), millimeters of mercury (mmHg), millibar (mbar), engineering atmospheric pressure (kg / cm 2).
　Divided vacuum region is no uniform requirement, it usually is divided country:
Rough vacuum: (760 to 10) Torr
Low vacuum: (10 to 10-3) Torr
High vacuum: (10-3 to 10-8) Torr
Ultrahigh vacuum: (10-8 ~ 10-12) care
XHV: 10-12 Torr
　Relations care and Pa: 1 Torr = 1 mm Hg (mmHg) = 133.322Pa, 1 Pa = 7.5 × 10-3 Torr.
　Features vacuum region of their different applications are different, such as vacuum cleaners work in rough area, thermos bottle, light bulbs and other work in the low vacuum region, while the vacuum switch and some other vacuum devices are working in a high vacuum region.All of the vacuum pressure need the vacuum pumps,or vacuum system to reach,such as rotary vane vacuum pump,liquid ring vacuum pump,rotary piston vacuum pump,dry scroll vacuum pump and so on.

Vacuum coating machine basic characteristics and types of valves

Vacuum coating machine vacuum valve characteristics, types: basic characteristics of the vacuum valve having high airtightness (sealing reliable); resistance to airflow as small as possible (i.e., the conductance valve as large as possible); a sealing member wear well, can be used repeatedly, long life; body material and seals put a small volume; flexible operation, easy to clean install, reliable performance and easy maintenance. In addition, the requirements for ultra-high vacuum valves can also bake temperature (450 ℃); on the throttle can even adjust the gas flow requirements.

Common vacuum valve body material mainly metal and glass. Manual vacuum valve actuator handwheel made of high strength plastic material. Glass vacuum piston known as "Hancock" is generally used on glass vacuum system, a small vacuum, vacuum gauge regulatory or calibration systems. The advantage is relatively easy to make, easy to use, easy to clean observation, chemical stability and good insulation, put less gas and so on. The downside is that because of the fragility of glass and curved mouth pistons coated with a layer of fat, so limit its scope. Vacuum industrial production needs, such as vacuum coating equipment, vacuum smelting equipment, vacuum heat treatment equipment, space environment simulation equipment, rocket engine simulation equipment, satellite surface charged analog devices, particle accelerators and controlled nuclear fusion equipment, heavy particle accelerators all metal valve.

Vacuum coating machine vacuum valves are usually classified according to the operating characteristics of the valve, drive principle, connection and usage can be divided into the following categories:
① according to the working pressure: low vacuum valve, high-vacuum valves, ultra-high vacuum valve;
② according to use: cut-off valves, isolation valves, charge (discharge) valve, throttle + feed valve closed valve,, etc;
③ According transmission principle: a manual valve, flashlight dual valves, solenoid valves, pneumatic valves, hydraulic vacuum valve;
④ according to the material: glass vacuum piston (Hancock), metal vacuum valve;
⑤ according to structural characteristics: a flapper valve, flap valves, butterfly valves, ball valves, valve rod, septum valve, gate valve, two-way valve, three-way valve, four-way valves, globe valves, right angle valve.

Electron Beam Evaporation Vacuum Coating Machine Principles and Characteristics

Electron Beam Evaporation Vacuum Coating Machine Working Theory

Electron beam evaporation source is heated by hot cathode emits electrons in the electric field, a high energy density electron beam directly onto the coating material bombardment. Kinetic energy of the electron beam is converted to heat, so that the material is heated to be gasified, complete evaporation coating.

The kinetic energy of electrons in the electric field potential U, obtained was
The kinetic energy of electrons in the electric field potential U, obtained
 In the formula, (electron charge to mass ratio). If the flow rate of the electron beam of electrons ne, the thermal effect is generated electron beams Qe

 Qe = neeUt = IUt

 Where

       I- beam electron beam, A;

       t- beam current duration of action, s;

      U- potential difference, V.

When the potential difference generated by the thermal energy (acceleration voltage) is high, the formula (Qe = neeUt = IUt) can make the membrane vaporized, thereby providing a good source for vacuum coating technology.

 Electron beam heating evaporation advantages:

① electron beam heating than resistance heating has a higher energy density, high melting point materials can be evaporated, such as W, Mo, Al2O3, etc., and to obtain a higher evaporation rate;

② vaporized materials into the water-cooled copper crucible, to avoid contamination of the crucible material, a thin film of high purity can be prepared;

③ particle kinetic energy electron beam evaporation, is favorable for obtaining a dense, good film adhesion.

 Electron beam heating of disadvantages:

① structure is more complex, more expensive equipment;

② If the high vapor density near the evaporation source, the interaction between the electron beam occurs and vapor particles, electron energy loss and the track will be offset. While causing excitation and ionization vapor and residual gas will affect the film quality.

Principle of rf sputtering coating machine

         

  Exterior burnish products, in fact, most of them are used the surface treatment, and said to the surface treatment, now of the coating is one of the typical type of surface treatment. And this kind of surface treatment of the main characteristic is that after coating makes the product's surface is covered with a layer of thin film and have the function of the isolated from the outside factors influence its surface. And the other is generally after coating, the surface has a certain iuster, for the products, improve the appeal. Now, use a lot of coating machinery, including the control sputtering coating machine, vacuum evaporation equipment, to introduce below the peak sputtering coating machine.
 Vacuum coating machine in a vacuum chamber, applying frequency to set two plates and in more than 50 kh high-frequency electric, is a small amount of electrons in the high frequency electric field in the high frequency electric field under the action of accelerating, collide with gas molecules, make gas ionization and emitted electron, the electronic and high frequency electric field will be accelerated, eventually forming the high frequency glow discharge. Radio frequency glow discharge of glow there is no difference between the two electrodes, each with a cathode dark space and negative hui district, plasma column between the two poles. Input coupling mode of high frequency power supply mode with capacitive coupling and inductance coupling, which is currently an internal principle of splash control sputtering coating machine, also because this principle makes the sputtering coating machine to use stability.