Let coating equipment maintenance has a higher value

Let coating equipment maintenance has a higher value

Each device has its own life, maintenance purpose is to maximize equipment performance and potential to improve the efficiency of the use of time and the value has risen considerably.
We often find that some coating plant equipment dirty, lots of grease, a lot of dust, many employers feel that as long as the equipment can do on the line, so clean out is no relationship between the external and internal, a complete waste of time is not necessary, did not realize the device from dust and grease will have an impact, it will reduce the life and performance of the equipment.
For maintenance coating equipment, maintenance and repair must have routine maintenance and periodic maintenance, equipment, the most important is attentive to the key analytical issues, well you can take a lot less detours, I believe that every teacher have deep get experience.
Routine maintenance coating equipment, for the conventional part of the day should be no time to check, for example, the oil will not be less, if the day was found in the production facilities have an adverse signs, even a little problem should be resolved immediately, less oil To add promptly, although oil is periodically replaced, parts can see a problem and do not work properly and so thoroughly broken in change, a problem may cause a chain reaction of problems arise more big losses, saying the remedy is better cooked rainy day.
Regular maintenance coating equipment, routine maintenance is not a substitute for regular maintenance, routine maintenance is shallow, regular maintenance should be deeper, who do not want to see is the machine problems in production led to production planning affected, coating operational status of the device directly affect product quality, production schedule, to ensure good operation of the equipment, establish and improve equipment maintenance and repair systems, standards are a must.
Many coating equipment pre-qualified, but often fails, coaters are not withstand even the best choice to use a lot of problems have appeared in the daily use, the machine does not allow the normal flow of work, there is no maintenance of equipment over . In good equipment is not withstand the toss, do not let the cold equipment at a critical moment, a little short of time to spend a day in maintenance equipment, perhaps unexpected potential value.

Vacuum coating machine dehumidifier?

Vacuum coating machine dehumidifier?

Vacuum is to support the environment of the operation of the vacuum coating machine need high vacuum equipment, in particular, we usually need to achieve high vacuum degree, the effect of extraction system is played, but besides extraction system, in the process of vacuum coating equipment operation, and is, degassing of artifacts.
Some artifacts itself inside there are a lot of gas, water, etc., these substances will be as device heating when the emissions in the vacuum chamber, reduces the degree of vacuum, what is more, some toxicity gas composition, direct damage to the vacuum chamber of the mechanical structure, the equipment can't normal operation.
In addition, is coating process, due to heat the gas in the expansion of workpiece, easy to split has plating layer on the membrane, the probability of this problem, of course, depending on the artifact itself physical properties, easy expansion, such as plastic probability is relatively high, hard, such as metal probability is lower, but also cannot ignore, so the workpiece degassing is very necessary.
We usually use the degassing method of workpiece is baking, by heating the piece in the gas, water discharge, before coating, extraction, heating the workpiece, when the workpiece in water and gas due to heat released after, together with vacuum indoor gas by a pump.
According to different workpiece different degassing measures, effectively control the workpiece internal gas and water discharge, improve the stability and uniformity of coating.

The operation of the vacuum coating machine

The operation of the vacuum coating machine

Vacuum coating machine mainly refers to a kind of need to be done under high vacuum coating, including many types, including vacuum ion evaporation, magnetron sputtering, MBE molecular beam epitaxy. The user for operating method of vacuum coating machine know? Below small make up for the operation method of the introduction of vacuum coating machine, hope you can help to you.
Electric control cabinet operation
1. Open water pump, air source.
2. Open the total power.
3. Maintain open pump, vacuum gauge, vacuum gauge files V1 position, wait for after its value is less than 10, then into the next operation. Takes about 5 minutes.
4. Open mechanical pump, to pump, turbomolecular pump power supply, start, vacuum gauge switch in position to V2, smoke until less than 2, about 20 minutes.
5. Observe the turbo molecular pump reading after 250, take out, to be before the machine and open
High valve to vacuum, vacuum reaches a certain degree to drive on the right side of the high vacuum header, observe the vacuum degree. Vacuum arrived at 2 x 10-3 after to open gun power supply.
DEF - 6 b operation
1. The total power supply.
2. At the same time open Ⅰ gun control and gun control Ⅱ power: according to the electron gun control Ⅰ power supply, delay switch, delay, power and to protect the light, three minutes after the time delay and protect the lights went out, if the back door is not closed or malfunction with the current relay, protect will normally on.
3. High pressure, high pressure will reach more than 10 kv, adjust the beam to about 200 ma, screen grid for 20 v / 100 ma, the filament current is 1.2 A, deflection current oscillation between 1 ~ 1.7.
Shut down the order
1. Close the high vacuum header, molecular pump.
2. Stay molecular pump to 50, in turn off valve, former level, high mechanical pump, this time takes about 40 minutes.
3. Below 50, to maintain the pump.

Vacuum coating and coating technology development and application of explanation

Vacuum coating and coating technology development and application of explanation:

PVD (physical vapor deposition) technology in the late 1970s, began to use in improving the mechanical properties of a hard film, the film is produced with high hardness, low friction coefficient, good wear resistance and chemical stability and other advantages. Initially successful application in the field of high-speed steel cutting tools tool manufacturing caused... the world's attention, the people in the development of high performance, high reliability, coating equipment, also carbide, ceramic knives in a more in-depth coatings applied research. PVD process has no adverse impact on the environment, in line with the development of modern green manufacturing.
Titanium treatment process temperature can be controlled below 150 ~ 500 ℃, so the process can be used for coating titanium substrate of a variety of materials, not only has colorful decorative effect, even more important is the use of PVD technology allows coating has excellent the physical and chemical properties, physical properties greatly enhanced surface hardness, friction coefficient and other indicators such as the matrix.

Coating application in glasses and cars have to differ?

Coating application in glasses and cars have to differ?

Glasses coating used in camera lens, such as myopia, hyperopia, presbyopic glasses corrective lenses. Vacuum coating machine
Coating is very thin, transparent film on the surface plating. The purpose is to wish to reduce the reflection of light, increase light transmittance, anti-ultraviolet radiation and minimizing down, ghost; Different colors of coating, also make different imaging color balance. In addition, the coating can be delay aging lens, color changing time.
Glasses coating commonly used drugs: zirconium dioxide (ZrO ₂), silica (the SiO ₂), ITO (increase conducting uv lens), HT - 100 (waterproof membrane, prevent aging and oxidation). Splash control sputtering coating machine
Coating principle: high voltage electron gun will be more than several kinds of medicine vaporization, uniformly distributed over the surface of the lens.
Automobile coating and beauty is the highest measures of protection of paint, can avoid oxidation, to brighten up to the paint, acid and alkali resistance, oxidation resistance, resistance to ultraviolet ray and other multiple functions. Because itself is a kind of inorganic membrane materials, no damage to paint. Vertical single door coating machine
In to the car coating, the color of its body due to aging embrittlement of paint and corrosion formation of oxide layer will go away for years. Can increase the surface hardness, avoid scratches and small aperture. Hold time is longest, about more than a year.

Why double door coater coating when two gate voltage difference is very big

Why double door coater coating when two gate voltage difference is very big

Should be a magnetron sputtering, but don't know whether I reaction sputtering, if is reactive sputtering, low voltage film slow is normal. Have not seen a similar coating machine, don't know whether two cavity is same? If not, there may be a flat place, but the speed is fast enough, show that the pressure is no problem. In addition, the stand or fall of magnet tests only target on the surface of the magnetic field strength is good, the higher the magnetic field intensity, the lower the voltage. Power supply is intermediate frequency or dc or rf, twin target, if not need to pay attention to whether the power cord connect anti? Made no mention of target's own reason, may be in the air oxidation, surface to sputter, with fine gauze after polishing time target practice.
In addition, the target water not too cold. When exposed to atmosphere are easy to be surrounded by water. Swap of vacuum coating machine equipment suggested that the two target location, so you can find out the cause of the target and magnet or coating chamber.

What is the working principle of various coating way?

What is the working principle of various coating way?

What is the working principle of various coating way? In accordance with the coating for vacuum coating machine mainly can be divided into: evaporative deposition, ion plating and magnetron sputtering coating, so how do they work?
The formation of sputtering deposition technology is the use of vacuum glow discharge, accelerate the positive ions make its bombardment of sputtering target material surface phenomenon, make out the surface of the target material particle deposition to form a thin film to the substrate.
Working principle of evaporative coating is put membrane material in vacuum coating indoor, after evaporation source heating evaporation, when the evaporation molecular mean free path is greater than the linear dimensions of the vacuum coating chamber, the steam of atoms and molecules escape from the surface of the evaporation source, little impact of other molecules or atoms and the obstacles, can directly reach the plating surface of the substrate, due to the low substrate temperature, then condensation and film.
Tial principle is the use of vacuum arc discharge counts in the evaporation source technology, is the source of ignition under vacuum evaporation (cathode), and self sustaining formed between anode arc discharge, which emitted from the cathode arc light point cathode material of ions.
Vacuum coating machine company, points out that because of the current local concentration, lead to the joule heat to the cathode material partly ionization, such as explosive to bias in the work under the action of combined with the reaction gas, which is deposited on the workpiece surface is formed by plating layer.

Vacuum coating machine coating principle is what?

Vacuum coating machine coating principle is what?

Vacuum coating machine coating principle is what? Vacuum coating machine is the product into during equipment widely used, with the rapid development of electronic industry, vacuum coating machine, coating quality gradually improve, so that we use in our everyday life come into contact with the plating products more and more.
In a sense, vacuum coating was also determined by the vacuum coating oil, in the vacuum coating, coating oil mentioned strong adhesive coating and the role of the metal film, it is in pieces at the bottom of the coating, plating and surface coating in the plating.
1. Vacuum environment
Vacuum environment is affecting the efficiency and results of vacuum coating, it is well known that vacuum coating is conducted under high vacuum coating, unit with Pa, the existence of the higher vacuum gas is less, for plating pieces of the influence of the lower.
2. The coating process
Vacuum coating unit into structure and vacuum coating technology with the constant progress of science and technology, is widely used advanced vacuum evaporation coating, vacuum ion plating and magnetron sputtering deposition, and so on, technology has adopted by the difference between different products, should the particular case according to the product to choose cost-effective coating process, which directly affects the vacuum coating machine of price and cost.

Vacuum coating machine system

  Vacuum coating machine system

Vacuum coating machine plasma beam sputtering coating machine mainly by the rf plasma source, vacuum system, the electromagnetic coil (transmitter coil and convergence coil), bias power supply, vacuum chamber (including target material and the substrate, etc.), vacuum control system, etc. Its salient features are its plasma control system, plasma control system is a key part in coating machine, including rf plasma source located at the side of the vacuum chamber, and and sputtering target materials on the plasma source outlet below configuration with an electromagnetic coil respectively. When two coil direction through current, magnetic field coil synthesis will guide electronic along the magnetic field generated in plasma source direction, so that the plasma beam bound on the magnetic field direction. With a negative bias of target at the same time, make the sputtering ion in electric field under the action of accelerating impact target surface, produce sputtering.
Vacuum coating machine control system of plasma
Vacuum coating machine this coating machine has very flexible control mode, such as sputtering rate can be changed by adjusting the bias of target and the plasma source of rf power adjusted this two ways. Plasma generator and the separation of the vacuum chamber design is the key to the wide range controllable sputtering process parameters, and the broad range of control parameters makes the particular application access to the optimization of process parameters. In addition, you can through the control system of vacuum sputtering rate adjustment.
Vacuum coating machine as shown in the curve for the target current and bias, a constant current density when the sputtering rate and the relationship between the target bias, with constant current rf power is 500 w.

Vacuum coating vendors would introduce coating control mode wavelength

Vacuum coating vendors would introduce coating control mode wavelength

Vacuum coating machine, vacuum coating vendors would introduce our materials for its membrane layer of materials, figure 1. The experimental results obtained for SiN film plating. Curve 1 is the reflection spectrum of epitaxial wafer before coating, curve 2 and 3, respectively corresponding to the film thickness of 95 nm and 135 nm, film thickness with elliptic partial instrument to measure. From the curve 1, film e - lh peak at 840 nm, e - hh peak at 848 nm, the location of the pattern wavelength at 832 nm. In type Chang Tong modulator, mode wavelength position should be in e ￣ hh peak of long wavelength direction; And often shut device, pattern wavelength location should be near the e - hh peak, and the top must be decreased membrane plating, otherwise the device will work in the saturated zone, reduce the modulation features of the device. Because the pattern wavelength position is not appropriate, to adopt the method of plating SiNO minus the membrane to move mode wavelength.
Vacuum coating machine, vacuum coating vendors would introduce 2 film thickness of 95 nm by curve of reflection spectrum, the wavelength shifted, but as a result of surface reflectivity, ASFP cavity resonance absorption and exciton absorption compared to compare weak, so can not see clearly on the curve mode wavelength position. Measured with elliptic partial instrument, the film refractive index of 1.8 or so, move about 10 nm wavelength by a theoretical calculation of the mode, at about 842 nm. After coating, e - hh peak of significantly lower reflectivity, although the model at this time Wavelength in e - hh peak position, but because the pattern wavelength from closer to make e - hh exciton peak near the reflectivity of reduce a lot.
Vacuum coating machine, vacuum coating vendors would introduce three film thickness of 135 nm by curve reflection spectrum shows that compared with the mode wavelength before coating, coating mode wavelength decreases after, from the original 832 nm to 832 nm. Film refractive index is 1.8, from the above theoretical analysis shows that when the refractive index of 1.8, film thickness increased to 135 nm, the model about 10 nm wavelength will drop, curve 3 belongs to this kind of situation.

Vacuum coating machine operating procedures

                          Vacuum coating machine operating procedures

1. Check Coater each operation control switch is in the "off" position.

2. Turn on the power switch, power transmission equipment.

3. Pull out the low-pressure valve. Pneumatic valve open after airflow hear the sound of the bell to start up valve, bell rise.

4. Mounting tungsten spiral heating child. The PVDF film and aluminum plate fixed on the rotating disk. Wear on the inside of the aluminum wire spiral heating child. Clean up various parts of the bell jar to ensure no impurities dirt.

5. falling bell.

6. Start a mechanical vacuum pump.

7. Open the composite power vacuum gauge (composite vacuum gauge Model: Fzh-1A).

8. When the low vacuum gauge "2" again to move the pointer to 6.7Pa clockwise, push the low pressure valve. Then left knob to "1" to point to a sector rotation measuring position.

9. The opening of the cooling water, diffusion pump start, heating 40min.

10. Pull the low pressure valve. Repeat operation program ⑦: left button "1" Go to point 2 zone measurement position. Low vacuum gauge "2" in the pointer moves clockwise, when the pointer moves to 6.7Pa, open pressure valve (the valve stem clockwise).

11. other low vacuum gauge "2" when the pointer moves to the right 0.1Pa, open filament regulatory switch.

12. Rotate the knob launch "4", so that the high-pressure vacuum gauge "5" in the pointer to the 5.

13. The launch, 0:00, measuring knob "9" to rotate to point zero position.

14. The rotary knob 0:00 "10", so that the high-pressure vacuum gauge "5" in the pointer to the 0 position.

15. The launch, 0:00, measuring knob "9" to rotate to point to the measuring position.

16. Standard rotary knob "3", so that the high-pressure vacuum gauge "5" in the pointer to 10.

17. Rotate "multiplier" switch button "8" to point 10-12, when the high-pressure vacuum gauge "5" in the left pointer counterclockwise when more than one, then the "multiplier" switch knob "8" to the point of rotation 10 -3.

18. When the high pressure vacuum gauge "5" in the counter-clockwise moves the pointer over 6.7Pa, start button switch rotary parts inside the bell to be plated PVDF membrane rotation.

19. Open evaporation button switch. The current sub-plug insertion hole evaporation electrodes allocation (has 1, 2, 3, 4 holes, insert any one hole).

20. The right hand wheel rotation to the right regulator, slowly rotating boost.

Evaporation vacuum coating machine

Evaporation vacuum coating machine

Reasonable configuration for the vacuum system. High pumping speed, high efficiency, energy saving, full automatic process controller can be simple, reliable, beautiful.
operational Principle :
The evaporation material (for example: Aluminum wire) vaporized and evaporated by high joule heat coming from high-resistance (heating elements), Vaporized aluminum material deposit on the surface of the substrate forming film.
product category:
ZF series evaporation vacuum coating machine including all kinds of the models ,for example:
Vertical single door type
Vertical double door type
Horizontal double door type
Square advertising board evaporation coating machine
Silicone oil protective film evaporation coating machine
Rainbow color evaporation coating machine
Inner coating evaporation coating machine
Laboratory/small size evaporation coating machine
Application field :
1) It can be widely used to do the decorative coating and function coating on the surface of plastic ,ceramic, glass , resin, candle and metal material .
2) high efficiency ,full automatic ,integrating the vacuum technology, evaporation coating and electromechanical integration technology together . Its an ideal equipment to do the high-grade decorative coating .
3) It can be widely used in Crafts, gifts, hardware appliances, accessories and electronics, machinery, light industry and other industries
Main feature:
1） Variety of structure: vertical type; horizontal type; single door type; double-door type.
2） Equipped with1-2 sets new model evaporation electrode, easy installation and discharge, convenient maintenance. Work rack flexible and reliable by public rotation of gear transmission structure.
3） Reasonable configuration for the vacuum system. High pumping speed, high efficiency, energy saving, full automatic process controller can be simple, reliable, beautiful.
Main Configuration:
(1) Variety structure: vertical type, horizontal type, single door, double-door, the vacuum chamber made by SUS 304 or high quality carbon steel. The vacuum chamber range from Φ600mm to Φ2200mm
(2) Vacuum system including: mechanical pump; diffusion pump, roots pump, diffusion pump with cooling trap, or adopts molecular pump that have the save energy, no pollution, no noise, high efficiency advantages.
3) Coating system adopts 1-2 sets new model structure Copper electrode resistance evaporation system & power
4) Auxiliary vacuum system uses Low temperature steam trap.
5) The electronic control system has the sound and light alarm device when circuits overload, it cutoff of gas or water.
6) the control system (touch screen +PLC ) can real-time display the detailed parameter ,the whole process can be full-automatic controlled ,automatic storage process parameters

Historical Development of vacuum coating technology

Historical Development of vacuum coating technology
In the film prepared in vacuo, crystalline coating system comprising a metal, semiconductor, insulator and other elemental or compound film. Although the chemical vapor deposition also uses vacuum, low pressure or vacuum plasma and other means, but generally refers to a physical vacuum deposition method for depositing a thin film. Vacuum coating has three forms, namely vapor deposition, sputtering and ion plating.
Vacuum coating technology is now beginning in the 1930s, forties and fifties began industrial applications, industrial mass production began in the 1980s, has made a wide range of applications in the electronics, aerospace, packaging, decoration, gilt printing and other industries. Vacuum coating means in a vacuum environment, a metal or metal compound vapor is deposited onto the surface of the material in the form of (usually non-metallic material), is a physical vapor deposition process. Because often the metal film coating, it is also called vacuum metallization.
Generalized vacuum coating further comprises a metal or non-metallic materials and other non-metallic surface of the vacuum vapor deposition polymer functional film. In all plating material to the plastic is most common, followed by, for paper coating. Relative to metals, ceramics, wood and other materials, plastics have sufficient sources of performance is easy to control, easy processing and other advantages, so a wide variety of plastic or other polymer materials as structural engineering decorative materials, widely used in automobiles, household appliances, household packaging, decorative and other industrial fields. However, the presence of surface hardness of plastic materials are mostly not high enough to look gorgeous, abrasion and low defects, such as the plastic surface layer deposited thin metal film can be given away plastic bright metallic appearance, suitable metal source also can greatly increase the wear resistance of the material surface, greatly expanded the scope and application of decorative plastic.

Vacuum coating machine works system components

               

Up to more than just coating application equipment, vacuum coating machine is the most widely used vacuum equipment; vacuum coating machine works with different processes and different process that affects the operation. Vacuum coating machine vacuum systems, cooling systems, detection systems, coating systems; evaporation coating, sputtering and ion plating methods.

Evaporation by heating evaporation source so that membrane evaporate into molecules and atoms escape the need to coating the surface and cooled condensation product film.

The use of arc discharge ion plating technology, ignition source cathode under vacuum to form between the anode source and arc discharge, in the role of bias and reactive gas compounds attached to the need to form a film surface coating products.

Glow discharge sputtering, and ion plating different glow discharge will have a high-speed ion bombardment so that the target (the target is required to deposit the membrane), sputtered particles are attached to the need to produce surface coating products film.

These are three different processes vacuum coating machine works.

Vacuum coating machine parts and systems of the points:

Coating machine parts used in different configurations of varying degree of vacuum, for low vacuum coating machines, vacuum system only needs to be configured to meet the mechanical pump to obtain vacuum; high vacuum coating machines need to configure the booster pump, Roots pumps, diffusion pumps maintaining high vacuum pumps, etc. in order to achieve access and stability.

Cooling is an essential source of everything, vacuum coating machine in normal working internally generated heat, the temperature of the cooling system is responsible for balancing the role of temperature regulation.

Each step of measuring is essential, to ensure that the equipment is properly stabilized detection systems work in a predetermined condition, such as problems in time to troubleshoot.

In the vacuum coating, the error will cause the product to the final coating operation results, understand the working principle of vacuum coating machines and solutions for each problem is very important, this article is merged into a vacuum to introduce the principle of vacuum coating machine components and systems.

Movement of the gas particles in the coating process

   

  Core Tip: In the process of coating in vacuum coating equipment, all the time are inseparable from the motion of the particles, where the particles including electrons, atoms, molecules, ions, and when they collide will be issued.
  In the process of coating the vacuum coating equipment, all the time are inseparable from the motion of the particles, where the particles including electrons, atoms, molecules, ions, as will happen when they collide with each other in a variety of role for the gas particles often happens is that the ionization and excitation.
  For example, sputtering vacuum coating machine, argon ions are produced by colliding electrons and argon molecules. Before electrons collide with argon in a state of high-speed movement, argon molecule is a single atomic structure, electron and atomic inelastic collision, the electron kinetic energy brought to the atom, according to the law of conservation of energy, the electron kinetic energy reduction, atomic internal energy increased after atomic electrons gain energy from low energy level on the transition to the high energy level, stimulate atom, the ground state atoms become excited by the state, but this time is very short, can be said to be an instant thing, some can be maintained around 10-7 time.
  If the energy of the electron atoms get large enough, you can get rid of the shackles of the nucleus and become free electrons, atoms from electrons, neutrons and protons, electrons are negatively charged, uncharged neutrons, protons are positively charged atoms electronic charge number and the charge number of protons equal, the atoms are not charged, but become free electrons break free electrons leave the atom, the proton atom electron charge number greater than the number of charges, causing atoms into positively charged ions, the target and the power supply cathode phase, positively charged argon ions in the electric field, the acceleration motion to the cathode. When an atom of argon ions collide with the target on, some ion kinetic energy transferred to the atom, atom sputtered out, and another part of the ion and atom after the collision, the electron transfer to the atom on the argon ions, argon ion obtain negative electric charge equal to the number of electrons, reduction of argon atoms, metal atoms lose electrons to become metal positive ions, and get part of kinetic energy.
  This is the movement sputtering in argon particles by atoms become ions, and then by the ion into a atom process repeatedly.

Evaporation vacuum coating machine

                   

 Reasonable configuration for the vacuum system. High pumping speed, high efficiency, energy saving, full automatic process controller can be simple, reliable, beautiful.
operational Principle :
The evaporation material (for example: Aluminum wire) vaporized and evaporated by high joule heat coming from high-resistance (heating elements), Vaporized aluminum material deposit on the surface of the substrate forming film.
product category:
ZF series evaporation vacuum coating machine including all kinds of the models ,for example:
Vertical single door type
Vertical double door type
Horizontal double door type
Square advertising board evaporation coating machine
Silicone oil protective film evaporation coating machine
Rainbow color evaporation coating machine
Inner coating evaporation coating machine
Laboratory/small size evaporation coating machine
Application field :
1) It can be widely used to do the decorative coating and function coating on the surface of  plastic ,ceramic, glass , resin, candle and metal material .
2) high efficiency ,full automatic ,integrating the vacuum technology, evaporation coating and electromechanical integration technology together . Its an ideal equipment to do the high-grade decorative coating .
3) It can be widely used in Crafts, gifts, hardware appliances, accessories and electronics, machinery, light industry and other industries
 Main feature:
1） Variety of structure: vertical type; horizontal type; single door type; double-door type.
2） Equipped with1-2 sets new model evaporation electrode, easy installation and discharge, convenient maintenance. Work rack flexible and reliable by public rotation of gear transmission structure.
3） Reasonable configuration for the vacuum system. High pumping speed, high efficiency, energy saving, full automatic process controller can be simple, reliable, beautiful.
Main Configuration:
(1)  Variety structure: vertical type, horizontal type, single door, double-door, the vacuum chamber made by SUS 304 or high quality carbon steel. The vacuum chamber range from Φ600mm to Φ2200mm
(2)  Vacuum system including: mechanical pump; diffusion pump, roots pump, diffusion pump with cooling trap, or adopts molecular pump that have the save energy, no pollution, no noise, high efficiency advantages.
3) Coating system adopts 1-2 sets new model structure Copper electrode resistance evaporation system & power
4) Auxiliary vacuum system uses Low temperature steam trap.
5) The electronic control system has the sound and light alarm device when circuits overload, it cutoff of gas or water.
6) the control system (touch screen +PLC ) can real-time display the detailed parameter ,the whole process can be full-automatic controlled ,automatic storage process parameters

Vacuum Coating machine model	ZF-1400	ZF-1600	ZF-1800	ZF-2000
Inner size of the   coating room （mm）	Ф1400*1900	Ф1600*2000	Ф1800*2000	Ф2000*2200
Rotation diameter of work piece rack*the length of axis*the Qty of axis	Ф450*1700*6	Ф480*1700*6	Ф580*1700*6 Ф490*1700*8 Ф450*1700*9	Ф540*1900*8
Pumping speed	It will take less than 7 minutes from air pump to 2*10-2Pa
Ultimate vacuum	8*10-4Pa
Vacuum pumping system	KT-800+ZJP-600+H-150 +2X-15A	2*KT-800+ZJP-1200 +H-150+2X-30A	2*KT-800+ZJP-1200 +H-150+2X-30A	2*KT-800+ZJP-1200+ 2*H-150+2X-30A
power	60KW	85KW	85KW	100KW
Control mode	Manual, semi-automatic and fully automatic control; Control panel use Chinese and English language
Equipment size（m）	4.6*6*2.85	5*7*2.85	6*8*2.85	8*8*3

Vacuum Coating Machine model	ZF-500	ZF-800		ZF-1000	ZF-1200
Inner size of the   coating room （mm）	Ф500*500	Ф800*800		Ф1000*1200	Ф1200*1200
Rotation diameter of work piece rack*the length of axis*the Qty of axis	Ф150*400*3	Ф220*500*6		Ф240*700*6	Ф395*900*6
Pumping speed	It will take less than 7 minutes from air pump to 2*10-2Pa
Ultimate vacuum	8*10-4Pa
Vacuum pump system	KT-300+2X-30A	KT-400 +2X-70A		KT-500+2X-70A+2X-8A	KT-500+ ZJP-300+2X-70A+2X-8A
power consumption	15KW	20KW		35KW	40KW
Control mode	Manual, semi-automatic and fully automatic control; Control panel use Chinese and English language
Equipment size（m）	1.25*1.6*2		2*2.2*2	2.5*2.2*2	2.8*2.5*2