Vacuum coating machines and dynamic magnetic field magnetron sputtering source

   Vacuum coating machines and dynamic magnetic field magnetron sputtering source

Motorized vacuum coating magnetic field magnetron sputtering vacuum coating sources, including the target substrate, solder or crimp ring is fixed in front of the target substrate sheet target, shielding ring, magnet board, within the magnet mounted on a magnet board and outside the magnet, the improvements made are: the diameter of the magnet is greater than the radius of the target substrate, and smaller than the diameter of the target, the target substrate magnet axis offset from the axis of the substrate, the substrate magnet fixed gear on a positive side, the coating machine ring gear meshing with the spur gear installed on the rack, the rear side of the installation located spur gear motor, motor power output shaft fixed to the frame turn handle, mounted on the gear shaft turn handle. Motor power output shaft and the ring gear coaxial with the target board settings.

The positive effect of this invention is: get a revolution and rotation of the annular magnetic field to scan to each target position, so that the target in a larger area to be etched shot off evenly. High target utilization, coating uniformity.

A moving magnetic field magnetron sputtering vacuum deposition coater, comprising a vacuum deposition chamber in front of the target substrate, welded or fixed to the sheet-shaped pressure ring positive target target substrate, covering the peripheral side surface of the target substrate and the target substrate positive target shielding material outside of the ring portion, an annular outer magnet disposed in combination target substrate on the back of the magnet substrate, the magnet is mounted on the center position of the magnet toward the substrate and the target substrate side circumferential position or arranged in rings outside the magnet,

Its features are: the diameter is larger than the radius of the target substrate magnet, and smaller than the diameter of the target, the target substrate magnet axis offset from the axis of the substrate, the substrate magnet fixed gear on a positive side, the installation and the coating machine frame ring spur gear, is mounted on the rear side of the spur gear rack located motor, the motor power output shaft fixed turn handle, mounted on the gear shaft turn handle.

Analysis Principle vacuum coating equipment

                             Analysis Principle vacuum coating equipment

Principle is the principle of magnetron sputtering vacuum coating equipment , as follows:
Colliding electrons accelerated in the electric field toward the substrate during in and argon atoms, a large number of ionized argon ions and electrons, the electrons onto the substrate. Argon ions accelerated in the electric field bombardment target, a large number of target atoms sputtered, neutral target atoms deposited in a film on the substrate.
Secondary electrons accelerated toward the substrate in the process influenced by the magnetic force of the magnetic field Lorenzi, bound within plasma region near the target surface, a high plasma density region, under the effect of the secondary electrons around the magnetic field the target surface in a circular motion, the motion path of the electrons is very long, constantly in motion the process of collision ionization of argon atoms with a large amount of argon ion bombardment target, after several collisions electron energy decreases, get rid of the shackles of the magnetic field lines , away from the target, eventually deposited on the substrate.
Magnetron sputtering is bound to a magnetic field and to extend the path of movement of electrons, the electrons change the direction of motion, increase the ionization rate of the working gas and the efficient use of energy of the electron vacuum coating apparatus.
Electronic destination just substrates, the vacuum chamber wall and the target source anode is electronic home. But generally the vacuum chamber and the substrate and the anode potential in the same. Interaction between magnetic field and electric field so that a single spiral electron trajectory in three dimensions, and not only in a circular motion in the target surface. As for the type of the target surface sputtering the circumferential contour, and that the magnetic field lines are targets of the circumferential shape of circular. Distribution of magnetic field lines in different directions will film a great relationship.
Coating machine manufacturers said, not only in the interaction mechanism magnetron sputtering magnetic and electric fields of work, multi-arc plated target ion source, a plasma source and so work under this principle. The difference is that the electric field direction, voltage and current magnitude only.

Vacuum Coaters wet coating technology and coating technology

Vacuum Coaters wet coating technology and coating technology
Membrane extensive selection of vacuum coating technology, you can control the thickness of the film and coating system functionality and performance of different films, can make a lot of new material with chemical and physical properties.
Wet coating technology is way past a coating that plating or electroplating, chemical reduction of the principles applied in the material deposited, this method will produce waste polluting the environment, in the past a lot of plating plant because of pollution problems have changed the coating process .
Vacuum coating system film coating technology, the film less susceptible to contamination, in a vacuum environment can be improved purity and compactness, no waste without pollution. Vacuum coating itself is contaminated, but the actual vacuum system will be used in organic coatings, it will also cause pollution, but compared to the wet plating technique, a lot less pollution, high efficiency vacuum coating technology has strong vitality, but it does not mean that vacuum coating technology can completely replace the traditional wet coating technology, and in the thickness of the film, the anti-aging still take advantage of the wet coating method, vacuum coating thin film coating system.
In addition, a solid layer is affected by the process and adhesion, either wet or vacuum coating technology coating technology, if the material surface is not clean and will affect the binding layer material.
With the development of science and technology, vacuum coating technology industries has become a means of improving product quality, low cost vacuum coating significant economic benefits so that more and more companies eager, China's production of vacuum coating machine has reached a considerable level, the system can be plated vacuum coating materials are also more and more, but the foreign equipment and contrast a little gap also exists for the development of vacuum technology to be improved.

Historical Development of vacuum coating technology

Historical Development of vacuum coating technology
In the film prepared in vacuo, crystalline coating system comprising a metal, semiconductor, insulator and other elemental or compound film. Although the chemical vapor deposition also uses vacuum, low pressure or vacuum plasma and other means, but generally refers to a physical vacuum deposition method for depositing a thin film. Vacuum coating has three forms, namely vapor deposition, sputtering and ion plating.
Vacuum coating technology is now beginning in the 1930s, forties and fifties began industrial applications, industrial mass production began in the 1980s, has made a wide range of applications in the electronics, aerospace, packaging, decoration, gilt printing and other industries. Vacuum coating means in a vacuum environment, a metal or metal compound vapor is deposited onto the surface of the material in the form of (usually non-metallic material), is a physical vapor deposition process. Because often the metal film coating, it is also called vacuum metallization.
Generalized vacuum coating further comprises a metal or non-metallic materials and other non-metallic surface of the vacuum vapor deposition polymer functional film. In all plating material to the plastic is most common, followed by, for paper coating. Relative to metals, ceramics, wood and other materials, plastics have sufficient sources of performance is easy to control, easy processing and other advantages, so a wide variety of plastic or other polymer materials as structural engineering decorative materials, widely used in automobiles, household appliances, household packaging, decorative and other industrial fields. However, the presence of surface hardness of plastic materials are mostly not high enough to look gorgeous, abrasion and low defects, such as the plastic surface layer deposited thin metal film can be given away plastic bright metallic appearance, suitable metal source also can greatly increase the wear resistance of the material surface, greatly expanded the scope and application of decorative plastic.

The vacuum knowledge

The vacuum knowledge

First, the basic concept of vacuum
Vacuum technology, the "vacuum" refers to a given space, the gas pressure is below atmospheric pressure gas state, that is to say, compared with the normal atmospheric pressure, a gas is relatively lean state.
　The degree of vacuum is an objective measure of the degree of lean gas. According to the theory of vacuum technology, the vacuum level is usually represented by gas pressure. In the International System of Units, the pressure is Pa (Pa) as a unit 1Pa = 1N / m2. Another common unit as well as child care (Torr), millimeters of mercury (mmHg), millibar (mbar), engineering atmospheric pressure (kg / cm 2).
　Divided vacuum region is no uniform requirement, it usually is divided country:
Rough vacuum: (760 to 10) Torr
Low vacuum: (10 to 10-3) Torr
High vacuum: (10-3 to 10-8) Torr
Ultrahigh vacuum: (10-8 ~ 10-12) care
XHV: 10-12 Torr
　Relations care and Pa: 1 Torr = 1 mm Hg (mmHg) = 133.322Pa, 1 Pa = 7.5 × 10-3 Torr.
　Features vacuum region of their different applications are different, such as vacuum cleaners work in rough area, thermos bottle, light bulbs and other work in the low vacuum region, while the vacuum switch and some other vacuum devices are working in a high vacuum region.All of the vacuum pressure need the vacuum pumps,or vacuum system to reach,such as rotary vane vacuum pump,liquid ring vacuum pump,rotary piston vacuum pump,dry scroll vacuum pump and so on.

Phone Screen Antireflection Film Coating System Technology

Using the phone's color LCD anti-reflective protective film can reduce glare eye affected by external stimuli to enhance viewing comfort, and protect the eyes. The base of the phone is commonly used PC or acrylic substrate. Both the substrate as a color LCD screen protection, there are disadvantages of high reflectivity. Because without a coating of protective screen interface has a reflectivity of at least 4.2%, in bright light (such as sunlight) exposure, the intensity of the reflected light will seriously reduce the contrast of the display image. Therefore, such a surface coating on the protection panel antireflection film reflectance is less than 0.5%, will improve the clarity of the display.

In the protective screen surface were coated with magnetron sputtering (Vacuum c​oating) on a high refractive index and low refractive index films Ti02 Si02 film, the protective screen has a low reflection antireflection effect. Since the PC or acrylic substrate is an organic material, it should be in the range of deposition temperature of 30-35 ℃.

Coating process

(1) substrate -PMMA, PC.

(2) a two-story film system antireflection coating ten waterproof membrane. Membrane system.

(3) coating. Using continuous reaction magnetron sputtering deposition machine.

① Power: Si target IF power, Ti target with ten pulsed DC power supply.

② vacuum degree: access Ar, 02, a vacuum degree of 5*10-1Pa.

③ Temperature: 25-35 ℃

④ finally deposited waterproof membrane IAF3

Vacuum coating machine works system components

               

Up to more than just coating application equipment, vacuum coating machine is the most widely used vacuum equipment; vacuum coating machine works with different processes and different process that affects the operation. Vacuum coating machine vacuum systems, cooling systems, detection systems, coating systems; evaporation coating, sputtering and ion plating methods.

Evaporation by heating evaporation source so that membrane evaporate into molecules and atoms escape the need to coating the surface and cooled condensation product film.

The use of arc discharge ion plating technology, ignition source cathode under vacuum to form between the anode source and arc discharge, in the role of bias and reactive gas compounds attached to the need to form a film surface coating products.

Glow discharge sputtering, and ion plating different glow discharge will have a high-speed ion bombardment so that the target (the target is required to deposit the membrane), sputtered particles are attached to the need to produce surface coating products film.

These are three different processes vacuum coating machine works.

Vacuum coating machine parts and systems of the points:

Coating machine parts used in different configurations of varying degree of vacuum, for low vacuum coating machines, vacuum system only needs to be configured to meet the mechanical pump to obtain vacuum; high vacuum coating machines need to configure the booster pump, Roots pumps, diffusion pumps maintaining high vacuum pumps, etc. in order to achieve access and stability.

Cooling is an essential source of everything, vacuum coating machine in normal working internally generated heat, the temperature of the cooling system is responsible for balancing the role of temperature regulation.

Each step of measuring is essential, to ensure that the equipment is properly stabilized detection systems work in a predetermined condition, such as problems in time to troubleshoot.

In the vacuum coating, the error will cause the product to the final coating operation results, understand the working principle of vacuum coating machines and solutions for each problem is very important, this article is merged into a vacuum to introduce the principle of vacuum coating machine components and systems.